sputter相关论文
Bipolar Resistive Switching Effect in BiFeO3/Nb:SrTiO3 Heterostructure by RF Sputtering at Room Temp
The (001) oriented BiFeO3 thin film was deposited on the Nb: SrTiO3 substrate by radio frequency magnetron sputtering te......
The design, fabrication and characterization of the X-ray supermirrors are discussed in this paper. Using the local opti......
1 Introduction Since the early of 1980’s,the studies of soft X-ray and EUV optics have been implemented in CIOMP (Chang......
4.0Me V 7Li++ RBS was used for investigations of thermal diffusion of Ag in Cu single crystals. The annealing of sample......
Effects of Substrate Temperature on Properties for Transparent Conducting ZnO:Al Films on Organic Su
This paper presents the substrate temperature dependence of opto-electrical properties for transparent conducting Al-dop......
Aiming at reducing the recombination of photo-induced carriers in semiconductor photocatalytic process, we prepared TiO2......
Deposition and properties of highly c-oriented of InN films on sapphire substrates with ECR-plasma-e
InN films with highly c-axis preferred orientation were deposited on sapphire substrate by low-temperature electron cycl......
Highly oriented ZnO nanorod arrays were successfully prepared on the indium tin oxide (ITO) substrate using a galvanosta......
Effect of Axial Magnetic Field on the Microstructure, Hardness and Wear Resistance of TiN Films Depo
TiN films were deposited on stainless steel substrates by arc ion plating. The influence of an axial magnetic field was ......
Effects of Forging and Heat Treatments on the Microstructure and Oxidation Behavior of 316LN Stainle
Microstructure of 316 LN stainless steel(ss),including the as-received material and samples processed by solution anneal......
Comprehensive study of crystalline AlN/sapphire templates after high-temperature annealing with vari
High-quality AlN/sapphire templates were fabricated by the combination of sputtering and high-temperature (HT) annealing......
研究了金属硅化物在电阻薄膜材料中的应用。用真空感应熔炼精密浇铸方法制备含铬和硅化物，作为溅射沉积在电阻薄膜的溅射阴极靶材。......
对Ｎｉ－９．７Ｃｒ－５．５ｌ－７Ｔｉ溅射纳米晶涂层进行了空气中高温氧化实验，观察并分析了Ｔｉ的作用及影响，研究结果表明：由于涂层中相对较高的Ｔｉ含量，１０００℃氧化２００ｈ后生成了由α－Ａｌ２Ｏ３和......
采用Ar＋离子束对U薄膜表面进行反应溅射,通过白光干涉仪和台阶仪的测量与分析,着重研究Ar＋离子束溅射能量、入射角度对其表面粗糙度R......
采用Ｘ射线衍射、透射电子显微镜和电阻－温度曲线等方法研究了近等原子的富Ｔｉ－ＴｉＮｉ合金薄膜的析出相和相变等特征，并对结果进行了详细讨论。......
探讨采用真空波导及反常波模式微波输入技术，以避名微波石英窗口的污染，并研究了这种微波耦合模式装置中等离子体的放电特征。......
建立了一套直流溅射系统以及其它辅助装置，溅射参数控制，测量了腔的超导性能和铌膜的特性。......
采用高效磁控溅射连续镀膜技术,在介质夹持杆上溅射Nb膜,然后在真空室里放入O2对膜层进行氧化,得到Nb2O5膜层,用测量电阻来控制膜......
本文借助三极反应溅射TiN炉,研究了高速钢刀具进行真空溅射TiN时,其TiN沉积层厚度、残余应力、基体硬度等特性随不同沉积时间的变......
本文提出一种通用高精度增量式光电码盘的检测电路。该电路适用于国产及进口的１６３８４线分辨率以内的任意增量式光电码盘的检测，检测精度为......
重点研究了利用偏轴射频溅射的方法在Ｓｉ衬底上生长ＹＳＺ缓冲层及Ｂｉ－Ｓｒ－Ｃａ－Ｃｕ－Ｏ超导薄膜的工艺，获得了８２Ｋ的超导转变温度。......
利用磁控溅射的方法在K52高温合金上制备同成分的纳米晶涂层,研究了该合金及纳米晶涂层在900℃的循环氧化行为。结果表明：铸态合金......
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用气密性氨基树脂和硅烷偶联剂封闭桐木胶合板，真空磁控溅射镀膜镍钛合金原予膜，使镀膜木材经过了紫外灯光照射，较高室内温度、湿度的......
本文研究了利用ＹＳＺ膜作缓冲层Ｓｉ衬底上溅射ＢＳＣＣＯ高温超导薄膜的生长工艺，分析了生长条件对Ｂｓｃｃｏ高温超导相的影响，并提出了ＹＳＺ／Ｓｉ上制备相ＢＳＣＣＯ膜的工艺参数。......
使用聚焦深度表面测量（DFF）方法对加速栅极下游表面腐蚀深度进行了测量,并将测量结果与数值模拟结果进行了比较,所使用的数值方法为P......
采用50 keV的N+对100μm厚的芸豆切片和75μm厚的Mylar(聚乙烯对苯二酸酯)高分子膜辐照,辐照剂量从1×1015ions/cm2到1×1......
文章就溅镀作为种子层在FR-4（高Tg）材料上进行了初步的研究，发现：不同的溅镀条件对线路剥离强度较大的影响，只有在适当的溅镀条件时才能......
高透明性的无机超疏水薄膜材料具有广阔的应用前景，采用磁控溅射法制备出表面具有纳米结构的金属Zn前驱体薄膜，并利用在低气压5Pa，温......
重点介绍了采用阴极溅射法制取的铂－铂铑１０薄膜热电偶的最新高湿应用，包括制造工艺、高温绝缘以及试验和应用结果。同时还讨论了目前正......
采用直流磁控溅射法在溅射气压为0.1-1.0Pa下制备了金属Mo膜。用扫描电子显微镜（SEM）和原子力显微镜（AFM）对单层Mo膜的表面、断面形貌......
分析了双离子束溅射镀膜机的设备原理、功能层次,参照《GJB/Z57维修性分配与预计手册》中的相关要求,根据各部件的故障率和维修经......
在原FTS-Ⅰ型对向靶溅射基础上，设计制作了DFTS－Ⅱ型双对靶溅射仪，它具有低温、高速、成分偏离小和连续均匀溅射的特性，能够同时或交替......
一台用于超灵敏质谱（AMS）的带有多靶机构的强流溅射负离子源已经研制完成，为了满足AMS的特殊要求，源的设计着重解决提高流程，降低记忆效......
Influence of Oxygen to Argon Ratio on the Structural and Morphological Properties of Nb-Doped SrTiO&
Nb-doped SrTiO3 (STNO) films were grown on (001)-oriented LaAlO3 substrates by a reactive ion beam sputter deposition at......
ＺｎＯ薄膜具有强的压电和光电效应，广泛用于制作各种声电和声光器件中．本文报道了用微波ＥＣＲ等离子体溅射法沉积了ＺｎＯ薄膜，并研究了该法制备ＺｎＯ膜的工......
用微波电子回旋共振（ＥＣＲ）等离子体溅射法在常温下制备出优质的ＴｉＮ薄膜．采用静电探针技术，对ＥＣＲ等离子体进行了诊断，研究了等离子体参数与装置运行......
1.IntroductionOxidation resistance of superalloys re-lies on the protectiveness of oxide scalesformed on their surfaces ......
应用的需求要求研制具有电磁屏蔽特性的透明薄膜,客观条件的限制使得这种薄膜不仅需要足够的透光性,还要具备相当的屏蔽效能.在比......
介绍溜矿井疏堵火箭输送动力喷射反冲的热力过程和动力特性。...
由真空直流溅射镀膜所得到的样品表面薄膜质量受到镀膜条件的影响，这些条件包括镀膜的氛围和直流电压，其中的惰性气体如氢气的气压控......
Comprehensive study of crystalline AlN/sapphire templates after high-temperature annealing with vari
High-quality AlN/sapphire templates were fabricated by the combination of sputtering and high-temperature(HT)annealing.T......
本文推出了利用电子回旋共振（ECR）等离子体在低温（～室温）和低压下(10-5～10-3Torr)产生的高密度、高电离度的等离子体溅射沉积薄膜的新技......
