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本文介绍了连续波电光检测法(CWEOP—continuous wave electro-optic probing)应用于AlGaAs/GaAs异质结构材料均匀性测量的原理、实验装置和实验结果。扫描电子显微镜电压衬度技术也用于观察测量样片,比较两者的结果发现有较好的对照。最后,讨论了实验结果,并对方法的应用作了展望。
In this paper, the principle, experimental setup and experimental results of CWEOP-CW probing applied to the uniformity of AlGaAs / GaAs heterostructure materials are introduced. Scanning electron microscope voltage contrast technique is also used to observe the measurement of the sample, the comparison of the two found a better control. Finally, the experimental results are discussed, and the application of the method is prospected.