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利用电子束直写系统(EBL)和反应离子束刻蚀系统(RIE)制作了两级正交偶极分形槽样品,其中空气槽的宽度为0.12μm,两级正交偶极分形槽结构中第一级和第二级的臂长分别为1.8μm和0.8μm。样品总体尺寸为35μm×35μm,是由20×20个正交偶极排列而成的,每个正交偶极之间的周期为1.5μm。采用实验和传输矩阵(TMM)理论模拟的方法研究了分形槽结构在近红外和中红外波段的透射曲线,正交偶极分形槽结构在1.7μm和5.2μm波长处得到两个增强透射峰,其透射率分别为36%和49%。理论模拟结果与实验测量结果基本一致。证明了两级正交偶极分形结构中自相似性的存在。
Two-stage orthogonal dipole fractal samples were fabricated by EBL (Direct EBL System) and Reactive Ion Beam Etching System (RIE). The width of the air groove was 0.12μm. In the two-stage orthogonal dipole fractal structure The arm lengths of the first and second stages are 1.8 μm and 0.8 μm, respectively. The sample has an overall size of 35 μm × 35 μm and is composed of 20 × 20 orthogonal dipoles with a period of 1.5 μm between each of the orthogonal dipoles. The transmission curves of the fractal groove structures in the near infrared and mid-infrared bands were studied by using the experimental and transmission matrix (TMM) theoretical simulation. The orthogonal dipole fractal grooves obtained two enhanced transmission peaks at 1.7 μm and 5.2 μm, The transmissivity is 36% and 49% respectively. Theoretical simulation results and experimental measurements are basically the same. The existence of self-similarity in two-stage orthogonal dipole fractal structure is proved.