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通过溶胶凝胶法在云母表面制备了Ti O2中间层薄膜,再在中间层上制备了VO2薄膜。通过视频光学接触角测量仪检测Ti O2薄膜的亲水性,利用XRD、傅立叶红外光谱仪和紫外可见分光光度计对复合薄膜的结构及光学特性进行分析。试验表明,紫外光激发后的Ti O2薄膜具有良好的亲水性,能够实现V溶胶的均匀涂覆。Ti O2中间层经510~560℃退火后,复合薄膜沿(011)晶面择优取向生长,复合薄膜红外屏蔽效能高,相变温度及滞后温宽都较低。中间层经460℃退火后的复合薄膜沿(111)晶面取向生长,红外屏蔽效能达到92%以上。
The Ti02 interlayer film was prepared on the surface of mica by sol-gel method, and the VO2 film was prepared on the interlayer. The hydrophilicity of Ti O2 thin film was measured by video optical contact angle measuring instrument. The structure and optical properties of Ti O2 thin film were analyzed by XRD, FT-IR and UV-Vis spectrophotometer. Experiments show that UV-excited Ti O2 film has good hydrophilicity and can achieve uniform coating of V sol. After annealing at 510-560 ℃, the composite films grow along the preferred orientation of the (011) crystal plane. The composite films have high infrared shielding effectiveness, low phase transition temperature and low hysteresis width. The intermediate layer was annealed at 460 ℃ after the composite film growth along the (111) crystal orientation, infrared shielding effectiveness of more than 92%.