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以ITO玻璃为衬底,利用脉冲激光沉积(PLD)法在温度为50、200和400℃下制备了CdS、ZnS薄膜。测量分析了温度对CdS及ZnS薄膜的透射光谱特性、光学带隙、Raman光谱特性等的影响。结果显示,在实验温度范围内:①ZnS薄膜比CdS薄膜透射性能好,光学带隙大;②ZnS薄膜的Raman光谱复杂,Raman特征峰较弱;CdS薄膜的Raman特征峰明显;③随温度升高,CdS与ZnS相比禁带宽度增加明显、Raman特征峰增高变窄。对此现象进行了解释,为利用CdS或ZnS薄膜作为CIGS薄膜太阳电池缓冲层提供了参考。
The CdS and ZnS thin films were deposited on the ITO glass substrates by pulse laser deposition (PLD) at temperatures of 50, 200 and 400 ℃. The influence of temperature on the transmittance spectra, optical bandgap and Raman spectra of CdS and ZnS thin films was measured and analyzed. The results show that in the experimental temperature range: ①ZnS thin film has better optical transmission and optical bandgap than CdS thin film; ② Raman spectrum of ZnS thin film is complex and Raman characteristic peak is weak; Raman characteristic peak of CdS thin film is obvious; ③With temperature increasing, Compared with ZnS, CdS increases the band gap and increases the Raman peak. This phenomenon is explained, which provides a reference for the use of CdS or ZnS thin film as CIGS thin film solar cell buffer layer.