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激光直写是一种适用于衍射光学器件及掩模加工的方法。利用声光调制器对曝光功率进行精确控制对所制作器件的性能是至关重要的。首先描述了声光调制器的迟滞现象及其对曝光后掩模表面图形的不良影响。基于这一分析 ,提出了一种方法来克服声光调制器迟滞现象所带来的问题。简述了此项技术的设计原理和实现。实际制作的掩模样品图案显示了所述方法的有效性
Laser direct writing is a suitable method for diffractive optics and mask processing. Precise control of exposure power using acousto-optic modulators is crucial to the performance of the device being fabricated. First, the hysteresis of an acousto-optic modulator and its adverse effect on the pattern of the exposed mask surface are described. Based on this analysis, a method is proposed to overcome the problems caused by the hysteresis of the acousto-optic modulator. The design principle and implementation of this technology are briefly described. The actually fabricated mask sample pattern shows the effectiveness of the method