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综述了NdFeB薄膜的国内外研究进展;介绍并分析NdFeB永磁薄膜的制备方法及溅射功率,溅射气压及靶基距对NdFeB薄膜的影响;概括总结NdFeB永磁薄膜的应用领域;展望NdFeB永磁薄膜的发展趋势和前景。
The progress of NdFeB thin films at home and abroad was reviewed. The preparation methods of NdFeB permanent magnetic thin films, the influence of sputtering power, sputtering pressure and target distance on the properties of NdFeB thin films were summarized and analyzed. The application fields of NdFeB thin films were summarized. Permanent Magnet Film Development Trend and Prospects.