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以正硅酸乙酯为前驱体,氨水作催化剂,采用溶胶-凝胶法提拉镀制SiO2双面膜,对薄膜进行氨处理和热处理。采用椭偏仪、分光光度计、红外光谱、扫描探针显微镜、静滴接触角测量仪表征薄膜的特性。研究表明:经氨热两步后处理,膜厚持续减小,折射率经氨处理先增大了0.236,再经热处理又减小了0.202,膜层透光性变好,透过率峰值持续向短波方向移动;经两步后处理的膜面平整度明显变好,与水的接触角先增大到58.92°后减小到38.07°。
Using tetraethyl orthosilicate as precursor and ammonia as catalyst, the double-sided SiO2 film was drawn by sol-gel method, and the film was treated with ammonia and heat treatment. The properties of thin films were characterized by ellipsometry, spectrophotometer, infrared spectroscopy, scanning probe microscope and drop contact angle measuring instrument. The results show that the film thickness decreases continuously with the two-step ammonia heat treatment. The refractive index increases by 0.236 after ammonia treatment and decreases by 0.202 after heat treatment. The transmittance of the film becomes better and the transmittance peak value continues To the shortwave direction of movement; after two steps of film surface roughness was significantly better, the contact angle with water first increased to 58.92 ° and then decreased to 38.07 °.