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为了提高可见光移相点衍射干涉仪的测量精度,对空气扰动误差的分析以及有效的抑制是十分必要的。利用自行设计的十三步移相算法与传统的五步移相算法对空气扰动误差进行了理论分析与仿真计算,分析结果证明了新算法的优越性,并且通过对干涉仪的空气扰动误差的分析,最终得到了干涉仪工作的环境控制条件,如果采用十三步移相算法,保证空气温度变化控制在±0.005℃以内,压强变化控制在±1 Pa以内,水汽压变化控制在±5 Pa以内,温度梯度变化控制在0~0.01℃范围内,压强梯度变化控制在0~2 Pa范围内,最后再对多次测量结果取平均,则空气扰动误差引起的位相误差将在测量精度允许的范围内。在现有的实验条件下搭建了原理实验装置,实验结果表明:十三步算法和五步算法的结果相近,但十三步算法的重复性优于五步算法。采用十三步算法,在所构建的实验装置上实现了RMS值优于λ/10 000(λ=632.8 nm)的检测重复性。
In order to improve the measurement precision of the diffraction point interferometer with visible light shift point, it is necessary to analyze the air disturbance error and suppress it effectively. The airborne disturbance error has been theoretically analyzed and simulated by using the designed thirteen-step phase-shifting algorithm and the traditional five-step phase-shifting algorithm. The analysis results prove the superiority of the new algorithm and the air-disturbance error of the interferometer Finally, the environmental control conditions of the interferometer are obtained. If the thirteen-step phase shifting algorithm is used, the air temperature should be controlled within ± 0.005 ℃, the pressure should be controlled within ± 1 Pa and the vapor pressure should be controlled within ± 5 Pa Within the range of 0 ~ 0.01 ℃, the pressure gradient is controlled within 0 ~ 2Pa, and finally the average of multiple measurements is taken, the phase error caused by the air disturbance error will be within the allowable range of measurement accuracy Range. Experimental results show that the results of the thirteen-step algorithm and the five-step algorithm are similar, but the repeatability of the thirteen-step algorithm is superior to the five-step algorithm. Using the thirteen-step algorithm, the detection repeatability with the RMS value better than λ / 10000 (λ = 632.8 nm) was achieved on the experimental setup.