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采用射频等离子体增强化学气相沉积法(RF-PECVD),以Ni/MgO为催化剂,在Si基片上生长了碳纳米管,采用X射线衍射(XRD)、扫描电镜(SEM)、Raman光谱以及高分辨透射电镜(HRTEM)等对不同的MgO含量下制备的碳纳米管形貌及结构进行了表征。结果表明,随着MgO含量的增加,从碳纳米洋葱转化为碳纳米管,其直径逐渐变小、均匀,碳纳米管纯度提高,结晶性能越好;碳纳米管顶端形成开口或闭口的碳洋葱纳米结构,而管的主干区域则存在催化剂,并且随着MgO含量的增加,呈现纳米颗粒转化为纳米线的趋势;MgO含量为50%时,部分碳纳米管的外壁剥离,形成了单原子石墨层,长度达到7nm,并在碳纳米管内部填充了Ni纳米线,其长度有60nm。
Carbon nanotubes were grown on Si substrate by RF-PECVD with Ni / MgO as catalyst. The structure of the samples was characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), Raman spectroscopy and high (HRTEM) were used to characterize the morphology and structure of carbon nanotubes prepared under different MgO contents. The results show that with the increase of MgO content, the diameter of carbon nanotubes transformed into carbon nanotubes becomes smaller and more uniform, the purity of carbon nanotubes increases, and the better the crystallization performance; the carbon nanotubes form the open or closed carbon onions While the main region of the tube is catalyst, and with the increase of MgO content, the tendency of nanoparticles to nanowires appears. When the content of MgO is 50%, the outer wall of some carbon nanotubes is peeled off to form monatomic graphite Layer, the length of 7nm, and filled with carbon nanotubes Ni nanowires, the length of 60nm.