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铜薄膜传感器在飞机金属结构损伤监测过程中,将长期面临大气腐蚀环境的影响。针对此背景,研究了铜薄膜传感器在腐蚀环境下的耐蚀性能,及腐蚀后的疲劳裂纹监测性能。首先,采用脉冲偏压多弧离子镀技术在不同弧电流和基体负偏压水平下制备了一系列铜薄膜,对其耐蚀性能进行了对比研究。结果表明,在弧电流60 A和基体负偏压250 V时沉积的铜薄膜耐蚀性能最佳。然后,结合耐蚀性能最佳的沉积工艺参数,在2A12-T4铝合金中心孔板试件上制备了同心环状铜薄膜传感器阵列,并开展了盐雾腐蚀试验。最后,对腐蚀试验后的铜薄膜传感器进行了疲劳裂纹监测试验。结果表明:铜薄膜传感器在腐蚀环境下具有良好的耐蚀性能,耐蚀时间达1 000 h;腐蚀试验后的铜薄膜传感器对裂纹变化敏感,能实现对裂纹定量监测,监测精度为1 mm,监测结果具有良好的可重复性。
Copper thin film sensors in the metal structure damage monitoring process, will be long-term atmospheric corrosion of the environment. Against this background, the corrosion resistance of copper thin film sensor under corrosive environment and the fatigue crack monitoring performance after corrosion are studied. First of all, a series of copper thin films were prepared by pulsed bias multi-arc ion plating at different arc current and substrate negative bias. The corrosion resistance of the films was compared. The results show that the corrosion resistance of copper films deposited at 60 A arc current and 250 V negative substrate bias is the best. Then, the concentric ring copper thin film sensor array was fabricated on the 2A12-T4 aluminum alloy center hole plate specimen in combination with the deposition parameters with the best corrosion resistance. The salt spray corrosion test was carried out. Finally, the fatigue crack monitoring test was conducted on the copper thin film sensor after the corrosion test. The results show that the copper thin film sensor has a good corrosion resistance under corrosion environment and the corrosion time is up to 1000 h. After the corrosion test, the copper thin film sensor is sensitive to the crack variation and can achieve the quantitative monitoring of cracks with the accuracy of 1 mm, Monitoring results have good repeatability.