本文对各种半导体光电探测器件的光谱响应,响应度的测试系统,原理,方法等做了较详细的介绍。其中对于直径为φ100μ光敏面积的探测器,在灵敏度测试中采用自制显微镜二次聚焦方法进行观察测量,得到了满意的结果。此外,对测试结果进行了分析,并讨论了测试误差,为完善测试方法及改进器件性能提供了有益的参考。 In this paper, a variety of semiconductor photodetection devices spectral response, responsiveness of the test system, principles, methods, etc. are described in more detail. Among them, for the detector with the diameter of φ100μ photosensitive area, the self-made microscope secondary focusing method was used in the sensitivity test to observe the measurement, and the satisfactory result was obtained. In addition, the test results are analyzed, and the test error is discussed, which provides a useful reference for improving the test method and improving the performance of the device.