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针对用于磨床加工的光外差表面粗糙度在线干涉测量仪，文中介绍了整机的信号处理系统，着重讨论了两项关键技术。即宽动态范围测量信号的自动控制和高精度动态相位测量，系统的测量精度达２．６°（相当于３．２ｎｍ），允许测量中最大多普勒频移±２０ｋＨｚ（对应高度的变化率±８．７５×１０－３ｍ／ｓ），完全满足磨床加工中表面粗糙度在线测量的要求。现场测试证实了这一点，这对于精加工、超精加工表面粗糙度的在线质量控制、提高加工精度等非常重要。
Aiming at the optical heterodyne surface roughness on-line interferometer which is used in the machining of grinder, this paper introduces the signal processing system of the whole machine, and focuses on two key technologies. Ie automatic control of wide dynamic range measurement signals and high-accuracy dynamic phase measurement, the system achieves a measurement accuracy of 2.6 ° (equivalent to 3.2 nm) allowing maximum Doppler shift of ± 20 kHz in the measurement (corresponding to a high rate of change ± 8.75 × 10-3m / s), fully meet the requirements of on-line surface roughness measurement in grinding machine. Field testing confirms this, which is important for on-line quality control of finishing, super-finishing surface roughness, and improved machining accuracy.