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该文论述了用于等离子体喷射金钢石膜设备的循环水冷却系统的特点和基本原理,给出了系统的有关参数和使用结果.“,”This paper introduces the cooling water cycle system,which is used in the equipment of DC plasma jet CVD diamond film.The features and basic principles of the system are discussed and the design parameters are analyzed.