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当振动式MEMS陀螺仪的驱动模态的振幅较大时,驱动模态中的硬弹簧非线性将变得显著。在驱动模态具有此非线性的情况下,比较了MEMS陀螺仪中常用的两种控制方法,即锁相环驱动和自激驱动。由于非线性模态在频域內的相位响应有迟滞效应,锁相环驱动方式不能稳定地锁定非线性模态的谐振频率。然而得益于自激驱动方式的工作原理,自激方式可以将非线性模态驱动在谐振点上。提出了一种改进的数字锁相环驱动方式。该改进的驱动方式以较大的驱动力为代价,提高了控制回路的稳定性。实验结果与仿真结果相一致,并且验证了所提出的驱动方式的可行性。
When the amplitude of the driving mode of the vibrating MEMS gyroscope is large, the non-linearity of the hard spring in the driving mode becomes significant. In the case of the driving mode with this non-linearity, two commonly used control methods in MEMS gyroscopes are compared: phase-locked loop driving and self-excited driving. Due to the hysteresis effect of the phase response of the nonlinear mode in the frequency domain, the PLL driving mode can not stably lock the resonant frequency of the nonlinear mode. However, thanks to the self-excited mode of operation, the self-excited mode can drive the nonlinear mode at the resonance point. Proposed an improved digital phase-locked loop drive. The improved driving method at the expense of a larger driving force, improves the stability of the control loop. The experimental results are consistent with the simulation results, and the feasibility of the proposed driving method is verified.