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金属微电极表面的纳米级处理可以大大提高电极的性能。本文基于微加工及电化学技术在铂微电极位点上制备了一致性良好的氧化铝纳米结构。通过对基片铂层表面等离子体处理,使铝膜与铂层之间粘附力明显增强。利用二次阳极氧化法,在铂微电极位点上制备出纳米孔。结果表明,30V是该条件下比较理想的氧化电压。同时,通过对氧化过程中电流的监测,发现当铝膜完全氧化后电流大幅上升,可将此现象作为终止阳极氧化的标志。这种微电极位点处的氧化铝模板可进一步用于不同材料纳米微电极的制备。
Nanoscale metal surface treatment can greatly improve the performance of the electrode. In this paper, based on the micro-fabrication and electrochemical techniques at the platinum microelectrode site prepared consistent good alumina nanostructures. By plasma treatment of the surface of the substrate platinum layer, the adhesion between the aluminum film and the platinum layer is obviously enhanced. Nano-holes were prepared on Pt microelectrode sites by secondary anodic oxidation. The results show that 30V is the ideal oxidation voltage under this condition. At the same time, through the monitoring of the current in the oxidation process, it was found that when the aluminum film is fully oxidized, the current rises sharply, and this phenomenon can be used as a sign of ending anodic oxidation. The alumina template at such microelectrode sites can be further used for the preparation of nanomaterials of different materials.