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采用蒙特卡罗模拟对氮气辉光放电等离子体阴极鞘层内离子（ Ｎ２ ＋ ， Ｎ＋ ） 和快中性分子（ Ｎ２ｆ） 的输运过程进行了研究，计算了阴极鞘层中离子（ Ｎ２ ＋ ， Ｎ＋ ） 和快中性分子的能量及角分布的空间变化，较好地解释了实验结果．得到了氮气辉光放电等离子体阴极附近主要存在着能量较低的荷能分子、密度较低的高能原子离子及密度和能量居中的分子离子．诸粒子状态随放电条件而变化．模拟结果为分子气体辉光放电等离子体过程的机理的认识提供了参考依据．
The transport process of ions (N2 +, N +) and fast neutrons (N2f) in the cathode sheath of nitrogen glow discharge plasma was studied by Monte-Carlo simulation, and the transport of ions (N2 + N +), and the energetic and angular distribution of fast neutrons, which explain the experimental results well. In the vicinity of the cathode of nitrogen glow discharge plasma, energetic molecules with lower energies, higher energy atomic ions with lower density, and molecular ions with lower density and energy are found. The state of the particles changes with the discharge conditions. The simulation results provide a reference for understanding the mechanism of molecular gas glow discharge plasma process.