论文部分内容阅读
在高功率准分子激光系统中,一般采用光学角多路技术来获得高能量窄脉冲输出。文中介绍了角多路技术原理,提出了一种采用矩形阵列和空间层叠光路结构的连续分振幅两次编码方式,并针对该实验室的XeCl高功率准分子激光系统进行了具体的编码光路设计,给出了设计实例。该方法具有编码结构紧凑,编码精度高,与光路准直、激光参数测量系统等兼容性好,便于加工制作和安装调节等优点,目前已在系统中应用,效果良好。
In high-power excimer laser systems, optical angle multiplexing is commonly used to achieve high-energy, narrow-pulse output. In this paper, the principle of multi-path angle technology is introduced. A continuous sub-amplitude two-time coding method based on rectangular array and space laminated optical path structure is proposed. The specific code optical path design of XeCl high power excimer laser system is carried out. , Gives a design example. The method has the advantages of compact coding structure, high coding precision, good compatibility with optical path alignment, laser parameter measurement system, and the like, and is convenient for manufacture, installation and adjustment, etc. and has been applied in the system with good effect.