为了解决真空镀膜机双轴密封问题,对真空镀膜机双轴采用磁性液体密封,设计了磁性液体密封整体结构、密封极齿和永久磁铁。分析了双轴磁性液体密封的设计。还使用Ansys软件计算了双轴磁性液体密封的磁场分布。在实验上对所设计加工的双轴磁性液体密封进行了实验研究,得出了磁性液体密封耐压能力与加注磁性液体量的关系。 In order to solve the problem of biaxial sealing of vacuum coating machine, a magnetic liquid seal is adopted on the biaxial of the vacuum coating machine, and the overall structure of the magnetic liquid seal is designed. The sealing teeth and the permanent magnet are designed. The design of biaxial magnetic fluid seal was analyzed. Ansys software was also used to calculate the biaxial magnetic fluid seal magnetic field distribution. Experimental study on the design and processing of biaxial magnetic liquid seal was conducted and the relationship between magnetic liquid seal pressure capacity and the amount of magnetic liquid was obtained.