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本文就Si为衬底的钇钡铜氧 (分子式Y1Ba2 Cu3O7-δδ≥ 0 5 ,简称YBCO)半导体薄膜的热辐射及宽光谱响应特性进行了研究 ,发现这种半导体探测器响应波段不仅在红外波段 ,而且在亚毫米波段甚至毫米波段都有良好的响应特性 ,该薄膜是继VO2 薄膜之后用于非制冷红外焦平面的一种新材料
In this paper, thermal radiation and broad spectral response characteristics of Si-based yttrium barium copper oxide (Y1Ba2 Cu3O7-δδ≥0 5, abbreviated as YBCO) semiconductor thin film have been studied. It is found that the semiconductor detector response band not only in the infrared band , But also has good response characteristics in the sub-millimeter wave band or even in the millimeter wave band. The film is a new material used for uncooled infrared focal plane following VO2 film