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本文指出：真空电弧蒸发源中热电子对电离作用通常占统治地位，等离子体近似处于局部热平衡状态。引入表观电离能（ｉ），不需复杂处理，就可估算出电离度。
This paper points out that in the vacuum arc evaporation source, the hot electrons usually dominate the ionization and the plasma is approximately in the local thermal equilibrium. The introduction of apparent ionization energy (i), without complex treatment, can be estimated ionization degree.