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本文介绍了台面型器件获取高的击穿电压的方法.主要从台面的形状和内部杂质浓度的分布两个方面进行了探讨,并且介绍了适于大量生产的制造工艺.
In this paper, the method to obtain high breakdown voltage of mesa devices is introduced, mainly from the aspects of the shape of mesa and the distribution of internal impurity concentration, and the manufacturing process suitable for mass production is introduced.