一、引言 超纯半导体不仅在核辐射及红外辐射探测等方面有重要应用,而且对半导体浅杂质态研究亦具有积极意义。由于超纯半导体中浅杂质含量极微,所有传统的杂质检测方法已难以探测和识别,因此很有必要发展相应的高灵敏度检测手段。光热电离光谱技术正是这样的理 I. INTRODUCTION Ultra-pure semiconductors not only have important applications in nuclear radiation and infrared radiation detection, but also have positive significance for the study of shallow impurities in semiconductors. Due to the extremely small impurity content of ultrapure semiconductors, all traditional impurity detection methods have been difficult to detect and identify, so it is necessary to develop corresponding high sensitivity detection methods. Photothermal ionization spectroscopy is such a reason