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在有源矩阵液晶显示中，目前倍受重视的应数多晶硅有源矩阵液晶显示技术。本文较详细地给出了高温多晶硅薄膜晶体管的制备工艺及其特性，并分析讨论了制备条件对多晶硅薄膜晶体管各种参数的影响。
In the active matrix liquid crystal display, the current much-valued polycrystalline silicon active matrix liquid crystal display technology. In this paper, the fabrication process and characteristics of high temperature polycrystalline silicon thin film transistor are given in more detail, and the influence of fabrication conditions on various parameters of polycrystalline silicon thin film transistor is analyzed and discussed.