一、前言早已报导过用干涉法测量微小振幅。Osterberg 提出了应用单色干涉条纹并以一个反射镜产生正弦运动方法的数学原理。用这种方法,按照光波波长可测量绝对振幅。然而,根据理论,通过直接观测条纹能测出的最小振幅限制到0.191λ(λ为光波波长)。可用干涉仪由一对平镜组成,由准直的光束照射。为了 I. Introduction The preamble has long been reported to measure small amplitudes using interferometry. Osterberg proposed the mathematical principle of applying monochromatic interference fringes and generating a sinusoidal motion with a mirror. In this way, the absolute amplitude can be measured according to the wavelength of the light. However, according to theory, the minimum amplitude that can be detected by direct observation of the fringes is limited to 0.191λ (λ is the wavelength of light). The available interferometer consists of a pair of flat mirrors, illuminated by a collimated beam. in order to