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采用质子交换技术，以苯甲酸为交换源，实验研究Ｘ－切ＬｉＮｂＯ＿３质子交换平面波导及其退火效应。利用棱镜耦合器测出波导模折射率。采用费米函数，由模折射率确定出波导折射率分布随退火时间的变化关系，给出了分布参数和曲线；
Using proton exchange technology, benzoic acid was used as an exchange source to study the X-cut LiNbO_3 proton exchange planar waveguide and its annealing effect. Waveguide mode refractive index measured by prism coupler. Fermi function was used to determine the distribution of waveguide refractive index distribution with annealing time by the mode refractive index, and the distribution parameters and curves were given.