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利用MonteCarlo(MC)模型研究了能量粒子对薄膜生长的初始阶段岛膜的形貌和岛的尺寸的影响 ,沉积粒子的能量范围为 :0— 0 .7eV .在模型中考虑了原子沉积、吸附原子扩散和蒸发等过程 ,并详细考虑了临近和次临近原子的影响 .结果表明 ,在所采用的参量范围内不同的基底温度情况下 ,能量粒子的影响有很大的区别 .低基底温度情况下 ,沉积粒子强烈地影响着薄膜的生长过程中 ,岛膜的形貌、数量和尺寸随能量粒子的能量增加而有很大的变化 .分析表明 ,这些变化都是由于能量粒子的介入使得表面吸附粒子的扩散能力增强所致
The Monte Carlo (MC) model was used to study the influence of energy particles on the island morphology and island size in the initial stage of film growth. The energy range of the deposited particles is 0-0.7 eV. The atomic deposition and adsorption Atom diffusion and evaporation, etc. The influences of adjacent particles and neighboring atoms are considered in detail.The results show that there is a great difference between the energy particles under different substrate temperatures in the parameters used.The results of low substrate temperature , The sedimentary particles strongly influence the growth of the films, and the morphology, number and size of the island films change greatly with the energy of the energy particles.Analysis shows that these changes are due to the energy particles intervening the surface Adsorption of particles due to enhanced ability to diffuse