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材料表面相糙度对其机械性能有很大影响,因此对粗糙度的检测是非常重要的。多年来人们一直努力发展粗糙度的检测技术,相继出现了干涉显微镜,接触式轮廓仪等仪器。这些仪器虽然能以较高的深度分辨率在常压下检测多种不同材料表面,但横向分辨率低。例如:接触式轮廓仪的最大横向分辨率只有100nm,即不能探测小于100nm的微观结构。扫描电镜虽然有较高的横向分辨率,但其深度分辨率较低,并且只能在真空环境中工作。八十年代初发展起来的扫描隧道显微镜(STM)开创了观测材料表面微观结构的新途径。这种仪器即使工作在大气环境中也能同时以很高的横向分辨率(最高～0.2nm)和深度分辨率(最高～0.01nm)给出金属、半导体等材料表面的三维图象。本文介绍了我们自己研制的STM并讨论了用STM
The roughness of the material surface has a great influence on its mechanical properties, so the detection of roughness is very important. Over the years people have been working hard to develop roughness detection technology, have appeared interference microscope, contact profiler and other instruments. Although these instruments can detect many different surfaces at atmospheric pressure with higher depth resolution, the lateral resolution is low. For example, the maximum lateral resolution of a contact profiler is only 100 nm, meaning that microstructures smaller than 100 nm can not be detected. SEM has a higher horizontal resolution, but its depth resolution is lower, and can only work in a vacuum environment. The scanning tunneling microscope (STM), developed in the early 1980s, opens new avenues for observing the surface microstructure of materials. The instrument provides simultaneous three-dimensional images of the surface of metals, semiconductors and other materials with high lateral resolution (up to ~ 0.2nm) and depth resolution (up to ~ 0.01nm), even while operating in the atmosphere. This article describes our own developed STM and discusses the use of STM