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研究了Nd2O3-SnO2复合薄膜气敏元件的制作工艺和敏感性能测量结果表明,这种元件对乙炔气体敏感,且具有选择性好、灵敏度高等优点
The fabrication process and sensitivity of Nd2O3-SnO2 composite thin film gas sensor were studied. The measurement results show that the device is sensitive to acetylene gas and has the advantages of good selectivity and high sensitivity.