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在光学设计和装调过程中,常常需要随时根据面形质量来预估光学系统的性能,传统的方法都是借助泽尼克多项式拟合光学表面面形来进行仿真评价。但非球面光学元件在加工过程中常常产生中高频误差,这类误差会引入小角度的散射,进而影响光学系统像质评价。提供了一种“点对应点”的仿真方法,通过准确评价面形质量获得高精度的像质预估结果,解决了传统的泽尼克多项式不能描述中高频成分的关键问题。该方法在实际光学系统中进行了验证,仿真结果和实测数据吻合度优于90%。
In the optical design and setup process, it is often necessary to estimate the performance of the optical system according to the surface quality at any time. The traditional methods are all based on the Zernike polynomial fitting optical surface shape for simulation evaluation. However, aspheric optics often produce mid- and high-frequency errors during processing. Such errors can introduce small-angle scattering, which in turn affects the quality of the optical system. This paper presents a simulation method of “point correspondence”, which can obtain the accurate result of image quality by accurately evaluating the figure shape and solve the key problem that the traditional Zernike polynomial can not describe the medium and high frequency components. The method is validated in practical optical system. The agreement between the simulation result and measured data is better than 90%.