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详细地介绍了前苏联1953年由国家制订的高真空油扩散泵工业产品的统一系列。该系列包括五种规格,在入口压力为1×10-4~1×10-5Torr(1 Torr=133Pa,下同)范围内,对空气的抽速为100~8000L/s,用Д-1A号泵油获极限压力为(2~5)×10-6Torr。以后又补充一台H-40T大泵抽速为32000L/s。抽速100和500L/s的泵为二级喷咀;抽速为2000、5000和8000L/s的泵为三级喷咀,而32000L/s的大泵出口连接一台БН-3型油增压泵。所有这些泵的最大出口压力不低于0.1Torr,因此前级泵可直接用机械真空泵,不必用增压泵即能正常工作。1990年按国际标准口径又研制了新系列产品,性能有所改进。本文对目前我国生产高真空系列扩散泵有一定的参考价值。
Introduced in detail the unified series of the industrial products of the high vacuum oil diffusion pump formulated by the state in 1953 by the former Soviet Union. The series includes five specifications, the inlet pressure of 1 × 10-4 ~ 1 × 10-5Torr (1 Torr = 133Pa, the same below) in the range of the pumping speed of air to 100 ~ 8000L / s, with Д-1A No. Pump oil by the ultimate pressure (2 ~ 5) × 10-6Torr. Later added a H-40T pumping speed of 32000L / s. Pumping speed of 100 and 500L / s for the second nozzle; pumping speed of 2000,5000 and 8000L / s pump for the three nozzle, and 32000L / s large pump outlet connected to a БН-3 oil by Pressure pump. The maximum outlet pressure of all these pumps is not less than 0.1 Torr, so the foreline pump can be directly operated by a mechanical vacuum pump without using a booster pump. In 1990 according to the international standard caliber and developed a new series of products, performance has improved. This article has some reference value to our country production of high vacuum series diffusion pump.