以界面电容分析法为主并结合XPS、AFM技术研究了醇类分子在Si(111) H表面上形成的有机单分子膜的特性。并探讨了嫁接反应中影响单分子膜特性的某些因素和单分子膜的稳定性及其对硅表面氧化的钝化作用。在所选择的反应条件下 ,不同链长醇分子修饰的硅表面上 ,嫁接分子所占体积分数约为 80 % ,平带电位约为 - 1 0 0V(vs .SSE)。研究表明 ,这类膜稳定性和对硅表面氧化的钝化作用非常有限 The characteristics of the organic monolayers formed on the surface of Si (111) H were investigated by the interfacial capacitance analysis method combined with XPS and AFM techniques. Some factors affecting the characteristics of monolayers and the stability of monolayers and their passivation on the surface oxidation of silicon were also discussed. Under the selected reaction conditions, the grafted molecules occupy about 80% of the volume on the silicon surface modified by alcohol molecules with different chain length, and the potential band potential is about -100V (vs. SSE). Studies have shown that this type of membrane stability and passivation of silicon surface oxidation is very limited