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研究了Co/Pt多层膜中 ,Co层厚度 ,Co、Pt含量比 ,溅射温度对多层膜磁光性能的影响。研究发现Co层厚度及Co、Pt含量比对Co/Pt多层膜的磁光性能起决定性影响 ,当tCo<0 4nm ,tCo/tPt=1/2时 ,可获得较好的综合磁光性能 ;适当提高溅射时基体的温度 ,可改善多层膜的结晶性并获得较好的调制周期结构 ,最终改善其磁光性能
The effects of Co layer thickness, Co, Pt content ratio and sputtering temperature on the magneto-optical properties of multilayers were investigated. It is found that the thickness of Co layer and the ratio of Co and Pt have a decisive influence on the magneto-optical properties of Co / Pt multilayers. When tCo <0 4nm and tCo / tPt = 1/2, ; Appropriately raising the temperature of the substrate during sputtering can improve the crystallinity of the multilayer film and obtain a better modulation period structure and finally improve its magneto-optical performance