论文部分内容阅读
报导了384(水平)×490(垂直)单元行间转移CCD摄象传感器(ED-500)。该器件采用灵敏的p-n~+结光电二极管、有大的电荷处理能力的CCD寄存器、低噪声电荷检测器和精细的隔行扫描。仅用一个这样器件的彩色摄象机照样得到高灵敏度和宽的动态范围。摄象传感器图形和单元横截面图示于图1和图2。每个单元是由一个没有任何复盖电极的p-n~+结光电二极管、一个转移栅φ_(TG)以及半位CCD垂直寄存器组成的。垂直寄存器由互补的时钟脉冲φ_(V1)和φ_(V2)驱动。表面沟转移栅和紧接着转移栅的垂直寄存器中小的表面沟部分起
A 384 (horizontal) × 490 (vertical) unit interline transfer CCD camera sensor (ED-500) was reported. The device features a sensitive p-n ~ + junction photodiode, a CCD register with large charge-handling capacity, a low-noise charge detector and fine interlacing. A color camera using only one such device still achieves high sensitivity and a wide dynamic range. The image sensor patterns and cell cross sections are shown in FIGS. 1 and 2. Each cell consists of a p-n ~ + junction photodiode without any overlying electrode, a transfer gate φ_ (TG), and a half-digit CCD vertical register. The vertical register is driven by the complementary clock pulses φ_ (V1) and φ_ (V2). The surface trench transfer gate and the small vertical trench in the vertical register next to the transfer gate