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利用TFCcal设计软件构建膜系结构,采用溶胶–凝胶工艺和提拉法在超白玻璃上制备出厚度精确可控的宽光谱、高增透型SiO_2/TiO_2/SiO_2-TiO_2减反膜,同时结合甲基三乙氧基硅烷(MTES)改性碱催化的SiO_2溶胶,通过提拉法一次制备出高透过率疏水型薄膜。研究表明,高增透型三层宽光谱减反膜的理论膜层厚度依次为:80.9 nm(内层SiO_2-TiO_2)、125.0 nm(中间层TiO_2)、95.5 nm(外层SiO_2),其在400~700 nm可见光范围内平均透过率实际可高达97.03%以上。多层膜经过退火处理后,膜面的水接触角高达131.5°,同时陈化两个月以后的多层膜透过率仅下降0.143%,表明制备的SiO_2/TiO_2/SiO_2-TiO_2多层减反膜具有优良的疏水和耐环境性能。
The film structure was constructed by using TFCcal design software. The wide-angle and high-transmittance SiO 2 / TiO 2 / SiO 2-TiO 2 anti-reflection film with precise thickness and controllable thickness was prepared on ultra-white glass by sol-gel process and Czochralski process Combined with methyltriethoxysilane (MTES) modified alkali-catalyzed SiO 2 sol, a highly permeable hydrophobic membrane was prepared by Czochralski method. The results show that the theoretical film thicknesses of three layers wide antireflection film are as follows: 80.9 nm (inner SiO_2-TiO_2), 125.0 nm (middle layer TiO_2) and 95.5 nm (outer layer SiO_2) The average transmittance in the visible range of 400-700 nm can actually be as high as 97.03%. After annealing, the water contact angle of the film surface reaches as high as 131.5 °, while the transmittance of the multilayer film after two months of aging decreases by only 0.143%, indicating that the prepared multilayer film of SiO 2 / TiO 2 / SiO 2 -TiO 2 Anti-film has excellent hydrophobic and environmental resistance.