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设计加工了一种太赫兹超材料微流体传感器件,利用时域有限差分法(Finite Difference Time Domain,FDTD)对其在太赫兹波段的传输、谐振及传感特性进行数值模拟。采用太赫兹时域光谱系统实验研究了偏振方向对传感器灵敏度的影响。实验结果表明,当超材料谐振环开口方向与入射太赫兹波的偏振方向平行和垂直时,折射率传感灵敏度可分别达到39.29 GHz/RIU和74.43 GHz/RIU。通过等效电路模型对该超材料器件的传输和谐振特性做了分析,并进一步明确了其传感机制。该超材料器件可对微量液体(5μl/mm~2)实现芯片式的折射率传感,具有较高的传感灵敏度,在化学生物传感器的设计和制造领域具有潜在的应用前景。
A THz metamaterial-based microfluidic sensing device is designed and fabricated. Its transmission, resonance and sensing characteristics in the terahertz band are numerically simulated by Finite Difference Time Domain (FDTD). The effect of polarization direction on the sensitivity of the sensor was experimentally studied by using the terahertz time-domain spectroscopy system. The experimental results show that the sensitivity of refractive index sensing can reach 39.29 GHz / RIU and 74.43 GHz / RIU respectively when the opening direction of the metamaterial resonant ring is parallel and perpendicular to the polarization direction of the incident terahertz wave. Through the equivalent circuit model of the metamaterials transmission and resonance characteristics are analyzed, and further clarify the sensing mechanism. The metamaterial device can realize the chip-type refractive index sensing for a trace amount of liquid (5 μl / mm 2), has high sensitivity and possesses potential application prospect in the design and manufacture of a chemical biosensor.