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本征反射率是X射线衍射摇摆曲线计算机模拟的基础。用X射线动力学理论研究了组分不均匀对HgCdTe材料X射线反射率的影响。研究结果表明,横向组分不均匀性直接影响摇摆曲线的峰形,峰值反射率和半峰全宽随组分不均匀的增大而分别减小和增大,且与组分不均匀性的均方差近似成指数关系,但其积分反射率却基本保持不变;采用多层模型对具有线性组分梯度的HgCdTe半导体材料反射率的计算结果则表明,纵向组分梯度除导致反射率峰值强度下降外,还会引起摇摆曲线产生单边干涉效应,摇摆曲线的半峰全宽和干涉峰间距随组分梯度的增加而增大,而干涉峰间距与干涉周期之间的关系则随组分梯度的增加其偏离线性的程度增大。
Intrinsic reflectance is the basis of computer simulation of X-ray diffraction rocking curves. X-ray dynamic theory was used to study the effect of non-uniform composition on X-ray reflectivity of HgCdTe material. The results show that the inhomogeneity of lateral components directly affects the peak shape of the rocking curve, the peak reflectivity and full width at half maximum decrease and increase with the increase of component nonuniformity, respectively, The mean square error is approximately an exponential relationship, but the integral reflectance remains unchanged. The calculation results of the multilayer HgCdTe semiconductor material with multi-layer model indicate that the gradient of the longitudinal component gradient leads to the decrease of the peak reflectance But also causes unilateral interference effect on the rocking curve. The full width at half maximum of the rocking curve and the interference peak spacing increase with the increase of the component gradient, while the relationship between the interference peak spacing and the interference period increases with the increase of the component The increase in gradient increases off-linearity.