论文部分内容阅读
据《Journal of Gxystal Growth》1993,128(1~4)报道:台湾新竹朱松工业技术研究学院材料实验室研制出一种新型石墨舟,这种石墨舟设计为三层,可在2片直径为40mm衬底上用液相外延(LPE)进行多层AlGaAs/GaAs双异质结生长。
According to the “Journal of Gxystal Growth” 1993,128 (1 ~ 4) reported: Taiwan Hsinchu Institute of Technology Zhuhai Institute of Materials developed a new type of graphite boat, the graphite boat designed for three, in two diameter Multilayer AlGaAs / GaAs double heterojunction growth by liquid phase epitaxy (LPE) on a 40mm substrate.