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在“星光 Ⅱ”装置上以类Ne铬x射线激光作为标定源 ,以平场光栅谱仪为分光元件进行了 2 8 5nm的Mo Si多层膜反射镜效率测量 .介绍了实验方法 ,给出了实验结果 ,本次研制的两块多层膜镜反射率分别为 3 1%和 9.6 % .
In the “Star Ⅱ” device to class Ne-chrome x-ray laser as the calibration source, the flat-field grating spectrometer as a spectroscopic component of the 2 55nm Mo Si multilayer mirror efficiency measurement is introduced. The experimental method is given The experimental results, the development of the two multilayer mirror reflectivity of 3 1% and 9.6%.