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采用射频反应磁控溅射法在硬质合金(YG8)基片上沉积了CNx和CNx/TiN复合薄膜,并对其进行了后处理。XPS分析CNx薄膜的化学结构表明其中含有N-sp3C和N-sp2C两种结构。摩擦磨损实验研究表明样品具有良好的耐磨性能,样品经后处理后摩擦系数显著降低。
CNx and CNx / TiN composite films were deposited on cemented carbide (YG8) substrates by radio frequency reactive magnetron sputtering and post-processed. The chemical structure of CNx film by XPS shows that it contains two structures, N-sp3C and N-sp2C. Friction and wear experimental studies show that the sample has good wear resistance, the sample after post-treatment friction coefficient decreased significantly.