论文部分内容阅读
本文提出一种利用半导体激光器的波长调谐特性实现的可调合成波长链绝对距离干涉测量方法 ,针对不同的待测距离 ,可选择不同的合成波长链 ,完成对待测距离的由粗测到精测的整个过程。文中基于这种方法构建了干涉测量系统 ,该系统利用压电陶瓷调制的在一条直线上的两个双光束干涉仪 ,使待测距离被包含于一个交流信号的相位项中 ,从而使小数条纹的测量转化为相位测量 ,合成波干涉条纹的小数级次由单波长干涉信号的相位测量值计算得到。文中以外尺寸测量为例描述了实验装置 ,实验结果表明 ,在现有的测量系统和实验条件下 ,待测距离小于 5mm时的测量极限偏差优于 2 0μm。
In this paper, we propose a tunable combined wavelength chain absolute distance interferometry using the wavelength tuning characteristics of semiconductor lasers. Different synthetic wavelength chains can be selected for different distances to be measured, ranging from coarse to fine The whole process. In this paper, an interference measurement system is constructed based on this method. The system uses two double-beam interferometers in a straight line modulated by piezoelectric ceramics, so that the distance to be measured is included in the phase term of an AC signal so that the fractional stripes Is converted to a phase measurement, and the fractional order of the interference fringes of the composite wave is calculated from the phase measurements of the single wavelength interference signal. The experimental device is described by taking the measurement of dimension outside the article as an example. The experimental results show that under the existing measurement system and experimental conditions, the measurement limit deviation when the measured distance is less than 5mm is better than 20μm.