建立了多发射极指功率SiGe HBT的热电反馈模型,研究了发射极指间距的变化对多指功率SiGe HBT表面温度分布的影响。在此基础上,提出了发射极指间距的非均匀化优化技术。在不同偏置下,对具有均匀间距和非均匀间距的多指HBT各指之间的温度分布进行模拟。结果表明,具有非均匀指间距结构的SiGe HBT峰值温度明显下降,各指之间的温度分布均匀性得到加强,这是传统均匀指间距技术无法比拟的,显示了非均匀指间距优化技术的优越性。 A multi-emitter SiGe HBT pyroelectric feedback model was established, and the effect of the emitter-finger spacing on the surface temperature distribution of multi-finger SiGe HBT was investigated. On this basis, the non-uniform optimization of emitter-finger spacing is proposed. Under different biases, the temperature distribution between fingers of multi-finger HBT with uniform spacing and non-uniform spacing was simulated. The results show that the peak temperature of SiGe HBT with non-uniform interdigitated structure is significantly decreased, and the temperature distribution uniformity between the fingers is enhanced, which is unmatched by the traditional uniform interdigital technique, which shows the superiority of the non-uniform interdigital technique Sex.