论文部分内容阅读
基于基片弯曲法原理,利用光杠杆放大曲率的方法,本工作研制了一套高精度全自动薄膜应力测试仪。在前期工作的基础上,该仪器实现了样品中心自动定位,样品表面曲率半径高精度测试,以及薄膜残余应力值自动计算等功能。标准光学玻璃圆台表面曲率半径的实测结果表明,应力仪测试精度达到千分位。此外,TiN薄膜应力沿层深分布的测试结果进一步验证了设备的可靠性。
Based on the principle of substrate bending method, using optical lever to enlarge curvature method, this work developed a set of high-precision automatic film stress tester. On the basis of the previous work, the instrument realizes the automatic positioning of the sample center, the high precision test of the curvature radius on the surface of the sample and the automatic calculation of the residual stress value of the film. The measured results of the surface radius of curvature of a standard optical glass table show that the testing accuracy of the stress gauge reaches the thousandths of a degree. In addition, the TiN film stress distribution along the depth of the test results further verify the reliability of the device.