论文部分内容阅读
本文分析了微机械谐振传感器的闭环工作特性，在此基础上研究了微机械谐振传感器的闭环恒幅驱动电路的设计原则，研制出闭环恒幅驱动电路，并在微谐振式真空传感器和双框架微谐振陀螺上得到应用。
This paper analyzes the closed-loop operating characteristics of a MEMS-based resonant sensor. Based on this, the design principle of a closed-loop constant-amplitude drive circuit for a MEMS-based resonant sensor is studied. A closed-loop constant-amplitude drive circuit is developed. Microstat gyro is applied.