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对影响单粒子微束装置束品质的因素进行了全面分析,并提出了一种优化单粒子微束装置束品质的方 法——用束流发射度精确测量与粒子束聚焦自动调节装置改进单粒子微束装置瞄准器出口束斑。
A comprehensive analysis of the factors influencing the beam quality of the single-particle micro-beam device is presented. A method for optimizing the beam quality of the single-particle micro-beam device is proposed. The method of accurate measurement of beam emission and automatic adjustment of particle beam focusing device is used to improve single particle Micro-beam device sight exit beam spot.