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分析了圆刻度机进行圆分划的误差来源,提出了用对径布置双刀架光刻方法来消除圆刻度机主轴晃动及刀架切向位移所引起的刻划误差。在同一圆刻度机上多次试验表明,直径为100毫米、刻线为10800条的圆光栅,用单刀架光刻,最大直径误差为1.0角秒左右;用对径双刀架光刻,最大直径误差为0.2～0.4角秒。实践证明,对径布置双刀架光刻法是提高圆刻度机刻划精度的有力手段。
The error origin of circular division of circular scale machine is analyzed. A double-holder lithography method is proposed to eliminate the scribing error caused by the main shaft of circular scale machine and the tangential displacement of the turret. Multiple tests on the same circular scale machine showed that the circular grating with the diameter of 100 mm and the engraving line of 10,800 engraved lines had a maximum diameter error of 1.0 arc second with a single-tool holder lithography; The error is 0.2 ~ 0.4 arc second. Practice has proved that the diametrically arranged double turret lithography is to improve the circular scale machine engraving accuracy of a powerful tool.