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讨论了扫描质子微探针(SPM)安装调试的方法,通过象差调整,提高了SPM系统的空间分辨率。该系统可提供空间分辨率为2-3μm、束流强度为100pA的3MeV H~+束和2MeV He~+束。
The method of installation and testing of scanning proton microprobe (SPM) is discussed. The spatial resolution of SPM system is improved by aberration adjustment. The system provides 3 MeV H ~ + and 2 MeV He ~ + beams with a spatial resolution of 2-3 μm and a beam current of 100 pA.