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本研究利用SEM、AES、XRD、Raman谱仪、纳米压痕仪、划痕仪和球-盘磨损实验机对掺钨DLC膜的微观结构和摩擦学性能进行了研究,结果表明:掺钨DLC膜光滑致密,具有纳米晶碳化钨和非晶碳组成的复相结构;其硬度和弹性模量为19-23GPa和200-228GPa,膜/基结合力好;摩擦系数随着载荷的增加略有增加,转速对摩擦系数的影响较小;当载荷大于1.96N时,磨损率随着载荷增加急剧增大,磨损率随着转速的增加存在一个极小值;DLC膜的磨损主要是由基体塑性变形引起的梯度掺钨DLC膜内部不同亚层之间的剥离和DLC膜的断裂引起的。
In this study, the microstructure and tribological properties of DLC films doped with tungsten were investigated by SEM, AES, XRD, Raman spectroscopy, nanoindentation, scratch tester and ball-plate wear tester. The film has a smooth and compact structure with a complex phase composed of nanocrystalline tungsten carbide and amorphous carbon. Its hardness and elastic modulus are 19-23 GPa and 200-228 GPa, and the film / substrate bonding strength is good. The friction coefficient increases slightly with the increase of load When the load is greater than 1.96N, the wear rate increases sharply with the increase of load, and the wear rate has a minimum with the increase of rotational speed. The wear of DLC film is mainly caused by the plasticity of matrix Deformation caused by the gradient of tungsten doped DLC film between the different sub-layers of the stripping and DLC film rupture caused.