一、前言以光的波长为基准校准标准尺的干涉仪已试制几种类型,大致可分两类,一类以高精度测量为目的;另一类以高效率测量为目的。两种干涉仪在原理上的差别;前者是光电显微镜在标准尺的刻线上停止一定时间,通过平均由狭缝振动得到多数刻线信号的时间决定位置。后者是光电显微镜在刻线上仅通过一次,得到一个信号,而决定其位置。也就是说,前者决定位置的精度高,效率低,而后者则 I. INTRODUCTION Interferometers that calibrate a standard ruler based on the wavelength of light have been trial-produced in several categories, roughly classified into two categories, one for high-accuracy measurements and the other for high-efficiency measurements. Two kinds of interferometer in principle difference; the former is a light microscope in the standard ruler cut off for a certain period of time, by the slightest vibration obtained by the majority of the groove signal to determine the location of time. The latter is the light microscope only once in the engraved line, get a signal, and determine its location. In other words, the former determines the location of the high precision, low efficiency, while the latter