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包材的性能是制约IC产线电子化学品品质的关键因素之一。盐酸是IC制造的基础电子化学品之一,其具有极其强的络合性能和渗透性。因而对比于其他电子化学品而言,其包材的要求更高。研究了IC制备用超纯盐酸包材HDPE的性能,包括颗粒溶出、金属溶出、外观稳定性。重点研究了盐酸在该HDPE中的渗透性能:渗透的方式、渗透速度、渗透条件等。并进一步总结评估这些关键参数对超纯电子化学品性能及存储条件的影响。
The performance of the package material is one of the key factors restricting the quality of electronic chemicals in the IC line. Hydrochloric acid is one of the basic electronic chemicals made by IC, which has extremely strong complexation properties and permeability. Thus compared to other electronic chemicals, the packaging requirements are higher. The properties of HDPE for ultrapure hydrochloric acid (IC) preparation, including particle dissolution, metal dissolution and appearance stability, were studied. The study focuses on the penetration of hydrochloric acid in the HDPE: the way of infiltration, infiltration rate, infiltration conditions and so on. And further summarizes and evaluates the impact of these key parameters on the performance and storage conditions of ultrapure electronic chemicals.